X-ray Metrology for the Semiconductor Industry Tutorial

Published by National Institute of Standards and Technology | National Institute of Standards and Technology | Metadata Last Checked: June 27, 2025 | Last Modified: 2018-12-01

Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry

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Complete Metadata

bureauCode	[ "006:55" ]
identifier	7CE906EBFAD7231EE0532457068153892009
landingPage	https://www.nist.gov/mml/materials-science-and-engineering-division/polymers-processing-group/x-ray-metrology
language	[ "en" ]
programCode	[ "006:045" ]
theme	[ "Electronics:Semiconductors", "Metrology:Dimensional metrology", "Nanotechnology:Nanoelectronics", "Nanotechnology:Nanometrology" ]