Data and scripts associated with "Quantification of STEM-in-SEM Energy Dispersive X-ray Spectra using Bulk Standards"

Published by National Institute of Standards and Technology | National Institute of Standards and Technology | Metadata Last Checked: June 27, 2025 | Last Modified: 2023-04-04 00:00:00

Spectra measured from SRM-2063a and standards at 20 keV, 25 keV and 30 keV. Scripts for processing this data. Scripts for Monte Carlo simulating thin films of ADM-6005a and Al2O3 on CaF2 and for quantifying these simulated spectra.

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Complete Metadata

bureauCode	[ "006:55" ]
identifier	ark:/88434/mds2-2975
issued	2023-05-19
landingPage	https://data.nist.gov/od/id/mds2-2975
language	[ "en" ]
programCode	[ "006:045" ]
theme	[ "Materials:Ceramics", "Materials:Composites", "Materials:Materials characterization", "Materials:Metals", "Materials:Superconductors" ]

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