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Patent AT-E401430-T1: [Translated] DIAMOND COATINGS ON REACTOR WALLS AND METHOD FOR THEIR PRODUCTION
A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a diamond containing surface and process for manufacture thereof.
Complete Metadata
| bureauCode |
[ "009:25" ] |
|---|---|
| identifier | https://healthdata.gov/api/views/q7xi-s24w |
| issued | 2025-09-05 |
| landingPage | https://healthdata.gov/d/q7xi-s24w |
| programCode |
[ "009:066" ] |
| theme |
[ "NIH" ] |
