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Patent AT-E400831-T1: [Translated] MICROFABRICATED MIRROR DEVICE
A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the z-direction. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.
Complete Metadata
| bureauCode |
[ "009:25" ] |
|---|---|
| identifier | https://healthdata.gov/api/views/quue-nmcj |
| issued | 2025-09-05 |
| landingPage | https://healthdata.gov/d/quue-nmcj |
| programCode |
[ "009:066" ] |
| theme |
[ "NIH" ] |
