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Patent AT-E400672-T1: [Translated] METHOD FOR FORMING AN ANTIREFLECTION COATING
Silsesquioxane resins useful in forming the antireflective coating having the formula (PhSiO(3-x)/2(OH)x)mHSiO(3-x)/2(OH)x)n(MeSiO(3-x)/2(OH)x)p(RSiO(3-x)/2(OH)x)q where Ph is a phenyl group, Me is a methyl group, R is selected from ester groups and polyether groups, x has a value of 0, 1 or 2; m has a value of 0.05 to 0.95, n has a value of 0.05 to 0.95, p has a value of 0.05 to 0.95, q has a value of 0.01 to 0.30 and m+n+p+q≈1.
Complete Metadata
| bureauCode |
[ "009:25" ] |
|---|---|
| identifier | https://healthdata.gov/api/views/ukca-ywxk |
| issued | 2025-09-05 |
| landingPage | https://healthdata.gov/d/ukca-ywxk |
| programCode |
[ "009:066" ] |
| theme |
[ "NIH" ] |
