NIST Electron Effective-Attenuation-Length Database - SRD 82

Published by National Institute of Standards and Technology | National Institute of Standards and Technology | Metadata Last Checked: June 27, 2025 | Last Modified: 2011-01-01 00:00:00

The NIST Electron Effective Attenuation Length Database provides values of electron effective attenuation lengths (EALs) in materials at user-selected electron energies between 50 eV and 2,000 eV. The database was designed mainly to provide EALs (to account for effects of elastic-electron scattering) for measurements of the thicknesses of overlayer films and, to a much lesser extent, for measurements of the depths of thin marker layers. EALs are calculated using an algorithm based on electron transport theory for measurement conditions specified by the user. A critical review on the EAL has been published [A. Jablonski and C. J. Powell, Surf. Science Reports 47, 33 (2002)], and simple practical expressions for the EAL, mean escape depth, and information depth are given in another paper by the same authors [J. Vac. Sci. Technol. A 27, 253 (2009)].

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Complete Metadata

bureauCode	[ "006:55" ]
identifier	ECBCC1C130092ED9E04306570681B10715
landingPage	https://www.nist.gov/srd/nist-standard-reference-database-82
language	[ "en" ]
programCode	[ "006:052" ]
references	[ "https://dx.doi.org/10.1116/1.3071947", "https://www.nist.gov/system/files/documents/srd/SRD82UsersGuideV1-3.pdf" ]
theme	[ "Standards:Reference data" ]