Data to accompany "Low Electron Beam Energy X-ray Microanalysis: The Adventure Continues!"

EDS spectra measured at E0 = 5 keV for 75 materials are provided along with the standards used for quantification with the NIST DTSA-II software for electron-excited X-ray microanalysis with energy dispersive spectrometry.The data sets are organized according to the analytical instrument platform used, and an EDS detector configuration appropriate to each EDS spectrometer is provided . Each folder contains spectra for that specific material and the standards used as well as an Excel file summarizing the DTSA-II results in terms of the raw mass concentrations, normalized mass concentrations, and atomic concentrations. Each calculated compositional value is accompanied by the uncertainty budget as estimated by DTSA-II.An Excel file (5keV_accuracy_summary_DTSA-II) containing an overall summary of results for all 75 materials is provided.

[
  "006:55"
]

[
  "en"
]

[
  "006:045"
]

[
  "Chemistry:Analytical chemistry",
  "Materials:Ceramics",
  "Materials:Composites",
  "Materials:Materials characterization",
  "Materials:Metals",
  "Metrology:Amount of substance"
]